Test and Measurement Channel

Freescale Selects SUSS Tool Set for MEMS Facility

SUSS MicroTec, a supplier of precision manufacturing and test equipment for the semiconductor and emerging markets, has shipped and successfully installed several microelectromechanical systems (MEMS) production tools at Freescale Semiconductor. The equipment included a new DSM200 Series Front-to-Back Alignment Verification System, the latest generation SUSS MA200Compact Mask Aligner as...
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