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Wide Tuning Range RF-MEMS Varactors Fabricated Using the PolyMUMPs Foundry

Semiconductor varactor diodes are widely used throughout the electromagnetic spectrum, but their performance limits their applications. One technology being pursued by industry and academia as a potential solution to these problems is RF-MEMS varactors...
T.K. Tsang and M.N. El-Gamal, McGill University; W.S. Best, Triangle ElectroMagnetics LLC; H.J. De Los Santos, NanoMEMS Research LLC
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Semiconductor varactor diodes are commonly used throughout RF, microwave and millimeter-wave spectrums for a variety of applications, 1,2 including the tuning of critical circuits such as voltage-controlled oscillators (VCO), filters, matching networks and phase-shifters in RFIC and MMIC circuits. However, semiconductor varactor diodes are limited in their applications by...
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