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The Influence of the Package Environment on the Functioning and Reliability of Capacitive RF-MEMS Switches

This article discusses the influence of the packaging process and environment on the functioning and reliability of capacitive RF-microelectromechanical systems (MEMS). It is shown that the packaging temperature profile can change the mechanical stress...
RF-MEMS switches offer a number of advantages for switching in the gigahertz range because of their low insertion loss, high linearity and low power consumption. 1 Several publications have reported on the performance of such switches, but more for non-packaged ‘naked’ samples. It is clear that the packaging process...
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