Ingrid De Wolf, Piotr Czarnecki, Anne Jourdain, Robert Modlinski and

Articles by Ingrid De Wolf, Piotr Czarnecki, Anne Jourdain, Robert Modlinski and

The Influence of the Package Environment on the Functioning and Reliability of Capacitive RF-MEMS Switches

This article discusses the influence of the packaging process and environment on the functioning and reliability of capacitive RF-microelectromechanical systems (MEMS). It is shown that the packaging temperature profile can change the mechanical stress...

December 1, 2005

Ingrid De Wolf, Piotr Czarnecki, Anne Jourdain, Robert Modlinski and

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RF-MEMS switches offer a number of advantages for switching in the gigahertz range because of their low insertion loss, high linearity and low power consumption. 1 Several publications have reported on the performance of such switches, but more for non-packaged ‘naked’ samples. It is clear that the packaging process...