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Surrey NanoSystems Sputtering System Aids Australian Research

The new Queensland Microtechnology Facility at Griffith University has ordered a Gamma sputtering system from Surrey NanoSystems , to support commercially-backed research into advanced semiconductor devices. The prime application for the system is to research, develop and establish pilot production procedures for silicon-carbide-on-silicon (SiC-on-Si) devices on wafers of up...
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