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Industry Study on Issues of MEMS Reliability and Accelerated Lifetime Testing

This article presents the results of an industry study on issues of reliability and accelerated life testing (ALT) for microelectromechanical system (MEMS) devices. The study efforts were conducted by the MEMS Industry Group (MIG) through surveying MEM...
At the request of the member companies and with guidance and support from the Defense Advanced Research Projects Agency (DARPA), the MEMS Industry Group engaged in a comprehensive effort to understand the realities and perceptions about the reliability of MEMS: from analyzing available data with successes and challenges, to...
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