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Improving Accuracy and Reliability of Microwave On-wafer Silicon Device Measurements

Recent research findings and general guidelines that relate to microwave on-wafer measurement of devices fabricated using silicon technologies
TECHNICAL FEATURES Improving Accuracy and Reliability of Microwave On-wafer Silicon Device Measurements Troels Emil Kolding Aalborg University, RISC Group Denmark Aalborg, Denmark This article summarizes recent research findings and general guidelines for microwave on-wafer measurement of devices fabricated using silicon technologies. Issues specific to low resistivity substrates and low...
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