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Industry News

Design and Fabrication Procedure for High Q RF MEMS Resonators

RF MEMS resonators have the potential to displace crystal resonators constructed from quartz or lithium niobate if suitable performance can be achieved from these micromechanical devices. This objective is achievable using the design and fabrication pr...

July 27, 2006
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Under exacting demands from customers, wireless systems providers are developing integration solutions to reduce the size, power consumption and cost of their systems. The trend now is that many of the non-semiconductor devices will be replaced by either software radio algorithms,1 or by miniature passive devices fabricated using silicon-based...
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