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ARTICLES

RF Technology in Semiconductor Wafer Processing

Design of Three-line Multi-layer Microstrip Directional Couplers at HF for High Power Applications

A practical method for designing three-line microstrip directional couplers at high frequency (HF) for high power applications is given for the first time using multi-layer dielectrics. The forward-coupling slope characteristic of the directional coupl...
It is common practice to use directional couplers in the HF range (3 to 30 MHz) for high power RF/microwave applications, such as magnetic resonance imaging (MRI), plasma generation for semiconductor processing equipment and laser drivers, in order to measure the transmitted and reflected powers accurately. Microstrip-type directional couplers...
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